ECE-5210: MicroElectroMechanical Systems: From Fabrication to Application
Description: MicroElectroMechanical Systems (MEMS) are very-small systems or systems made of very small components. The course focuses on the design, fabrication, and application of microsystems providing a unique opportunity for interdisciplinary interactions. The course consists of lectures, readings from the current literature, discussion by students, and team-work projects. The major topics covers are: materials in MEMS; microfabrication techniques; sensing and actuating mechanisms; wafer-level packaging; and case-study of some MEMS-based devices and lab-on-a-chip systems. Graduate standing required.
Pathways: N/A
Course Hours: 3 credits
Corequisites: N/A
Crosslist: N/A
Repeatability: N/A
Sections Taught: 9
Average GPA: 3.58 (A-)
Strict A Rate (No A-) : 51.36%
Average Withdrawal Rate: 0.00%
| Masoud Agah | 2024 | 73.6% | 20.4% | 4.5% | 0.0% | 1.6% | 0.0% | 3.58 | 9 |