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Virginia Tech

ME-5764: Modeling MEMS and NEMS

Description: Modeling MEMS and NEMS is about the construction, analysis, and interpretation of mathematical and computational models of microelectromechanical and nanoelectromechanical systems (MEMS and NEMS). A goal throughout the course will be to develop a physical intuition for the fundamental phenomena at these small scales. The material covered will be broad and multidisciplinary including: dimensional analysis and scaling; a review of continuum mechanics; fluid dynamics, elasticity, thermal transport, and electromagnetism at the micro and nanoscales; the modeling of a variety of new MEMS/NEMS devices; and approaches beyond the continuum theory including stochastic and deterministic methods. Graduate standing required.

Pathways: N/A

Course Hours: 3 credits

Prerequisites: N/A

Required By: N/A

Corequisites: N/A

Crosslist: BMES-5764

Repeatability: N/A

Sections Taught: 3

Average GPA: 3.80 (rounds to A-)

Strict A Rate (No A-) : 58.67%

Average Withdrawal Rate: 0.00%

Mark R Paul202385.7%14.3%0.0%0.0%0.0%0.0%3.803

Grade Distribution Over Time

1234GPA
Spring 2019Spring 2021Spring 2023Term050% W